In 2001 Applied Materials entered the field of electron beam (microscopy for) wafer inspection to resolve nano-scale features. Within this product group I managed a team of scientists, engineers and technicians (during the peak, 4 PhDs, 1 manager from Japan, and 1.5 technicians) for the advanced electron beam (microscopy) wafer inspection product.
I managed activities ranging from idea/concept, design, prototyping, debugging/testing, system integration and technology transfer to the manufacturing group.
Led a team of scientists, engineers and technicians (6 people) to develop an advanced electron microscopy inspection system for semiconductor wafer inspection.
Managed numerous collaborations between our technology partners Delong Instruments in the Czech Republic, and Topcon in Japan.
Cut delivery time and cost by 500% for prototypes and product modules.
Managed activities ranging from idea/concept, design, prototyping, debugging/testing, system integration and technology transfer to the manufacturing group
I invented a novel multi-column scheme for improving inspection throughput by >10x.The most compelling advantage of this invention over other competitive approaches is not relying on any high risk, as yet unavailable technologies. The proposal initially faced strong resistance but was ultimately adopted for the next generation platform.
Electron optics; developed electron beam columns, with wide angle objective lenses and detectors, high speed electron detectors, flood gun bending optics, etc.
A member of the committee to decide the next generation 10x system.
Led a team to construct a testbed for the electron microscope column quality control, diagnostic and testing at the Japan's partner site.
Participated in noise elimination for micro discharge noise (dielectric breakdown due to micro scale voids in cable) due to detection electronic floating at high voltage (6-8 KV).
One of the key members assigned to reduce acoustic noise, mechanical vibration, detector/pre-amplifier electronic noise analysis and reduction.
Managed a team comprising engineers from the US, the Czech Republic and Japan for mechanical component/sub system design, specification, manufacture and testing.
Led the design, development and production of high-precision ceramic components used in the objective lens.
Led the design, development and manufacture of flood gun optics.
Resolved mechanical and acoustic vibrations.
Collaborated with our technology partners in the Czech Republic and Japan for objective lens, detector and gun lens/source design, manufacture and quality control.
Implement a quality control scheme to increase Czech manufacturing quality.
Outsourcedoutsourced the column manufacture to our Japanese partner, and implemented test-bed and acceptance procedures for quality control of electron columns shipped from Japan.